Manufacturing intelligence for determining machine subgroups to enhance yield in semiconductor manufacturning.
Chen-Fu ChienYing-Jen ChenChia-Yu HsuYi-Hao YehPublished in: WSC (2011)
Keyphrases
- wafer fabrication
- semiconductor manufacturing
- production line
- cell formation
- artificial intelligence
- manufacturing systems
- intelligent systems
- printed circuit boards
- material handling
- manufacturing processes
- quality control
- manufacturing industry
- decision making
- intelligent machines
- batch processing
- production process
- data sets
- human intelligence
- subgroup discovery
- social networks
- genetic algorithm