An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator.
Longqi RanYichuan WuJiangbo HeBinlei CaoZongda HuWu ZhouPublished in: NEMS (2023)
Keyphrases
- detection method
- experimental evaluation
- high precision
- synthetic data
- pairwise
- optimization method
- clustering method
- neural network
- evaluation method
- power consumption
- fully automatic
- optimization algorithm
- significant improvement
- preprocessing
- machine learning
- feature set
- computationally efficient
- main contribution
- support vector machine
- cost function
- segmentation method
- computational complexity
- objective function
- image processing
- data sets