Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects.

Pengfei Xu Chiara Marchese Guy Lepage Negin Golshani Ruben Van Eenaeme Andrea Mingardi Joost Van Ongeval Rafal Magdziak Luc Halipre Darko Trivkovic Peter Verheyen Maumita Chakrabarti Dimitrios Velenis Andy Miller Filippo Ferraro Yoojin Ban Joris Van Campenhout

Published in: OFC (2024)

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