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STOMA: Simultaneous Template Optimization and Mask Assignment for Directed Self-Assembly Lithography With Multiple Patterning.

Jian KuangJunjie YeEvangeline F. Y. Young
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2018)
Keyphrases
  • discrete optimization
  • database
  • optimization problems
  • optimization algorithm
  • optimization method
  • global optimization
  • real time
  • multiscale
  • video sequences
  • data streams
  • matching algorithm
  • optimization methods