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Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator.

Mehdi AllamehByoungyoul ParkCyrus Shafai
Published in: Sensors (2024)
Keyphrases
  • electric field
  • space time
  • real world
  • three dimensional
  • control system
  • neural network
  • artificial intelligence
  • search space
  • closed loop
  • high impact