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Double-cantilever device for Atomic Force Microscopy in dynamic noncontact-mode.

Anne-Dorothea MüllerFalk MüllerJürgen MiddekeJan MehnerJ. WibbelerThomas GessnerMichael Hietschold
Published in: Microelectron. Reliab. (2002)
Keyphrases
  • atomic force microscopy
  • neural network
  • artificial intelligence
  • dynamic environments
  • machine learning
  • decision trees
  • case study
  • similarity measure
  • multiscale
  • control system