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Twisting sliding mode control of an electrostatic MEMS micromirror for a laser scanning system.
Hui Chen
Zhendong Sun
Weijie Sun
John Tze-Wei Yeow
Published in:
IEEE CAA J. Autom. Sinica (2019)
Keyphrases
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sliding mode control
laser scanning
visual inspection
adaptive fuzzy
robot manipulators
three dimensional
control strategy
adaptive neural
high resolution
microscopy images
fuzzy control
support vector regression
control algorithm
chaotic systems
nonlinear systems
shape from shading
specular surfaces
image analysis