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A Light-Weighted CNN Model for Wafer Structural Defect Detection.

Xiaoyan ChenJianyong ChenXiaoguang HanChundong ZhaoDongyang ZhangKuifeng ZhuYanjie Su
Published in: IEEE Access (2020)
Keyphrases
  • probabilistic model
  • statistical model
  • computational model
  • high level
  • theoretical framework
  • defect detection
  • management system
  • mathematical model
  • real time
  • objective function
  • process model
  • experimental data