Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks.
Amita RawatKrishna K. BhuwalkaPhilippe MatagneBjorn VermeerschHao WuGeert HellingsJulien RyckaertChangze LiuPublished in: ESSCIRC (2021)