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Automatic Defect Classification System in Semiconductors EDS Test Based on System Entity Structure Methodology.
Youngshin Han
SoYoung Kim
Taekyu Kim
Jason J. Jung
Published in:
IEICE Trans. Inf. Syst. (2010)
Keyphrases
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defect classification
fully automatic
hierarchical structure
graph structure
image processing
semi automatic
structural information
database
data sets
database systems
natural language
mobile robot
tree structure
network structure
geometric structure