Login / Signup
MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA.
Zheng Lu
Hao Jia
Ding Wang
Haitao Yu
Published in:
Sensors (2024)
Keyphrases
</>
high speed
flow rate
highly accurate
high accuracy
high quality
low cost
genetic algorithm
sensitivity analysis
sensor networks
computationally efficient
real time
random variables
high density
frequency band
cmos technology
infrared
heat transfer
image sensor
cross section
probability distribution
neural network