Knowledge augmented broad learning system for computer vision based mixed-type defect detection in semiconductor manufacturing.
Junliang WangPengjie GaoJie ZhangChao LuBo ShenPublished in: Robotics Comput. Integr. Manuf. (2023)
Keyphrases
- defect detection
- semiconductor manufacturing
- learning process
- knowledge acquisition
- learning systems
- word processing
- knowledge management
- learning algorithm
- acquire knowledge
- reinforcement learning
- prior knowledge
- computer programming
- real time
- human experts
- subject matter
- knowledge transfer
- learning tasks
- online learning
- domain knowledge
- cooperative learning
- solving problems
- science education
- knowledge level
- supervised learning
- knowledge representation
- learned knowledge
- learning environment
- discrete event simulation
- image processing
- young students