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A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor.

Junwoo LeeWook ChoiYong Kyoung YooKyo Seon HwangSang-Myung LeeSungchul KangJinseok KimJeong-Hoon Lee
Published in: Sensors (2014)
Keyphrases
  • thin film
  • sensor data
  • sensor networks
  • real time
  • multi sensor
  • image sensor
  • contact force
  • database
  • data analysis
  • knowledge discovery
  • high speed
  • decision support system