Feedback control of surface roughness of GaAs [001] thin films using kinetic Monte-Carlo models.

Yiming Lou Panagiotis D. Christofides

Published in: ACC (2004)

Keyphrases

monte carlo
monte carlo simulation
feedback control
thin film
markov chain
closed loop
room temperature
particle filter
real time
surface roughness
monte carlo tree search
model selection
pose estimation
complex systems
optimal control
multi layer