Modular model-based supervisory controller design for wafer logistics in lithography machines.
Bram van der SandenMichel A. ReniersMarc GeilenTwan BastenJohan JacobsJeroen VoetenRamon R. H. SchiffelersPublished in: MoDELS (2015)
Keyphrases
- controller design
- control system
- nonlinear systems
- control scheme
- control strategy
- modular robots
- control strategies
- closed loop
- real time
- control algorithm
- dynamic model
- fuzzy control
- fuzzy logic
- reduced order model
- computer simulation
- process control
- wafer fabrication
- artificial intelligence
- fuzzy logic controller
- control law
- electron beam
- integrated circuit
- control method
- complex systems