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Development of high-quality low-temperature (≤ 120°C) PECVD-SiN films by organosilane.

Hiroshi TakaKatsumasa SuzukiNorihiro TsujiokaShoichi Murakami
Published in: 3DIC (2015)
Keyphrases
  • high quality
  • case study
  • data sets
  • ground truth
  • social networks
  • neural network
  • image processing
  • multiscale
  • information processing
  • development process
  • rapid development