Hiroshi Taka

Publication Activity (10 Years)

Years Active: 2015-2015
Publications (10 Years): 0

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Rapid Development

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Publications

Hiroshi Taka, Katsumasa Suzuki, Norihiro Tsujioka, Shoichi Murakami
Development of high-quality low-temperature (≤ 120°C) PECVD-SiN films by organosilane. 3DIC (2015)