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Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes.
Mehmet Ozdogan
Shahrzad Towfighian
Published in:
Micromachines (2016)
Keyphrases
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dynamic behavior
business intelligence
dynamic networks
field of view
high density
nonlinear equations
real time
neural network
multiscale
knowledge discovery
multi modal
highly nonlinear
complementarity problems
speed control
sweet spot