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Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology.

Chen LiQiu-lin TanWendong ZhangChenyang XueYunzhi LiJijun Xiong
Published in: Micromachines (2014)
Keyphrases
  • personal computer
  • high sensitivity
  • fiber bragg grating
  • optical fiber
  • machine learning
  • databases
  • search engine
  • case study
  • mobile robot
  • data processing
  • cost effective
  • multichip module