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FTIR spectroscopy for the hermeticity assessment of micro-cavities.

David VeyriéDjemel LellouchiJ.-L. RouxFrancis PressecqAngie TetelinClaude Pellet
Published in: Microelectron. Reliab. (2005)
Keyphrases
  • x ray
  • ultrasound images
  • infrared
  • real time
  • data sets
  • databases
  • social networks
  • computer vision
  • case study
  • database systems
  • multiscale
  • high resolution
  • electron microscopy
  • microscopic images