Layout Decomposition for Triple Patterning Lithography.

Bei Yu Kun Yuan Duo Ding David Z. Pan

Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2015)

Keyphrases

decomposition method
electron beam
information retrieval
multiscale
wide range
database
databases
data mining
artificial intelligence
website
hidden markov models
wavelet transform
image decomposition
cf loadingtexthtml
document image retrieval