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Identifying Systematic Failures on Semiconductor Wafers Using ADCAS.
Melanie Po-Leen Ooi
Hong Kuan Sok
Ye Chow Kuang
Huiyuan Cheng
Eric Kwang Joo Sim
Serge N. Demidenko
Chris W. K. Chan
Published in:
IEEE Des. Test (2013)
Keyphrases
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semiconductor manufacturing
process control
databases
machine learning
information retrieval
learning algorithm
image processing
web services
data structure
preprocessing
relational databases
qualitative and quantitative