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Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System.

Chunxia JiangRongbin LiXin WangHailong ShangYong ZhangPeter K. Liaw
Published in: Entropy (2020)
Keyphrases
  • mechanical properties
  • metal oxide
  • wide range
  • information theoretic
  • information entropy
  • neural network
  • mutual information
  • real time
  • information theory
  • anisotropic diffusion
  • fuzzy entropy