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High-Speed Wafer Temperature Control Approach of Step Chiller for Semiconductor Manufacturing Equipment.

Hyeonjun YunHyeseon KwonSangsu YehMinsu LeeJonghwa KimYunha KimSeungwoo ChaMingu KangJooyeop Nam
Published in: IECON (2023)
Keyphrases
  • semiconductor manufacturing
  • high speed
  • temperature control
  • discrete event simulation
  • process control
  • control algorithm
  • real time
  • production system
  • pi controller
  • control system
  • pid controller