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Seungwoo Cha
Publication Activity (10 Years)
Years Active: 2023-2023
Publications (10 Years): 1
Top Topics
Pi Controller
Temperature Control
Semiconductor Manufacturing
Discrete Event Simulation
Top Venues
IECON
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Publications
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Hyeonjun Yun
,
Hyeseon Kwon
,
Sangsu Yeh
,
Minsu Lee
,
Jonghwa Kim
,
Yunha Kim
,
Seungwoo Cha
,
Mingu Kang
,
Jooyeop Nam
High-Speed Wafer Temperature Control Approach of Step Chiller for Semiconductor Manufacturing Equipment.
IECON
(2023)