Superhydrophobic surface obtained using pyramidal PTFE film fabricated on RIE etched silicon.
Chul-Heum BaekLitao YaoSung-Bo SeoHwa-Min KimDae-Seung PyoPyo-Hwan HongJung-Hwa OhDae-Young KongChan-Seob ChoJong-Hyun LeeIn-Yong EomBonghwan KimPublished in: NEMS (2013)