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Low-capacitance Ultrathin InGaAs Membrane Photodetector on Si Slot Waveguide towards Receiver-less System.

Tomohiro AkazawaD. WuKai SumitaN. SekineM. OkanoKasidit ToprasertpongS. TakagiMitsuru Takenaka
Published in: VLSI Technology and Circuits (2022)
Keyphrases
  • waveguide
  • high speed
  • metal oxide
  • high levels
  • high data rate
  • x ray
  • infrared
  • high frequency
  • small size
  • room temperature