Low-capacitance Ultrathin InGaAs Membrane Photodetector on Si Slot Waveguide towards Receiver-less System.
Tomohiro AkazawaD. WuKai SumitaN. SekineM. OkanoKasidit ToprasertpongS. TakagiMitsuru TakenakaPublished in: VLSI Technology and Circuits (2022)