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Study of GHz-SAM sensitivity to delamination in BEOL layers.
A. Khaled
Luka Kljucar
Sebastian Brand
Michael Kögel
R. Aertgeerts
R. Nicasy
Ingrid De Wolf
Published in:
Microelectron. Reliab. (2017)
Keyphrases
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database
artificial neural networks
factors affecting
data sets
expert systems
statistical analysis
experimental study