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Performance and layout effects of SiGe channel in 14nm UTBB FDSOI: SiGe-first vs. SiGe-last integration.
R. Berthelon
François Andrieu
P. Perreau
E. Baylac
A. Pofelski
Emmanuel Josse
Didier Dutartre
A. Claverie
Michel Haond
Published in:
ESSDERC (2016)
Keyphrases
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dual channel
thin film
mixed signal
real time
multi channel
solar cell
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