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Noncontact Subnanometer Resolution Displacement Sensing With Wide Bandwidth Based on Squeeze Film Damping Effect.

Shenghang ZhaiJialin ShiPeng YuTie YangYang YangChanmin SuLianqing Liu
Published in: IEEE Trans. Instrum. Meas. (2023)
Keyphrases
  • real time
  • low resolution
  • wide range
  • sensor networks
  • high bandwidth
  • high resolution
  • power system