Sign in
An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements.
Yan Qiao
Yanjun Lu
Jie Li
Siwei Zhang
Naiqi Wu
Bin Liu
Published in:
IEEE Trans Autom. Sci. Eng. (2022)
Keyphrases
</>
high level
statistical model
experimental data
data mining
similarity measure
expert systems
prior knowledge
cost function
probabilistic model
end users
management system
computational model
conceptual model
formal model