High-speed intermittent-contact mode scanning probe microscopy using cantilevers with integrated electrostatic actuator and thermoelectric sensor.
Deepak R. SahooWalter HäberlePeter BächtoldAbu SebastianHaralampos PozidisEvangelos EleftheriouPublished in: ACC (2009)
Keyphrases
- high speed
- contact force
- charge coupled device
- data acquisition
- real time
- sensor data
- sensor networks
- image processing
- low power
- closed loop
- multi objective optimization
- structured light
- control system
- multi objective
- neural network
- high throughput
- sensor fusion
- fluorescence microscopy
- scan data
- fluidized bed
- high frame rate
- control method
- high resolution
- evolutionary algorithm
- data sets