A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination.
E. AydinM. KangulF. GokceÖzge ZorluHaluk KulahPublished in: IEEE SENSORS (2016)
Keyphrases
- significant improvement
- computational cost
- image processing
- computationally efficient
- fully automatic
- high precision
- synthetic data
- clustering method
- optimization algorithm
- input data
- edge detection
- cost function
- segmentation method
- bayesian networks
- main contribution
- support vector machine svm
- mutual information
- detection method
- prior knowledge