MEMS Comb-Actuator Resonance Measurement Method Using the 2nd Harmonics of the GND Current.
Yoshikazu TakahashiPublished in: Asian Test Symposium (2001)
Keyphrases
- high accuracy
- detection method
- main contribution
- cost function
- pairwise
- preprocessing
- computational complexity
- optimization method
- computational cost
- prior knowledge
- significant improvement
- fully automatic
- experimental evaluation
- objective function
- edge detection
- multiscale
- segmentation method
- closed loop
- high frequency
- data sets
- synthetic data
- optimization algorithm
- computationally efficient
- dynamic programming
- evolutionary algorithm
- machine learning