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Influence of substrate surface roughness on the properties of a planar-type CO2 sensor using evaporated Li3PO4 film.

Hairong WangPeng LiGuoliang SunZhuangde Jiang
Published in: NEMS (2013)
Keyphrases
  • surface roughness
  • curved surfaces
  • viewpoint
  • thin film
  • three dimensional
  • face recognition
  • object recognition
  • point correspondences
  • planar surfaces
  • film thickness