Guiding Template-Induced Design Challenges in DSA-MP Lithography.
Shao-Yun FangKuo-Hao WuPublished in: ISVLSI (2018)
Keyphrases
- design process
- optimal design
- design issues
- matching algorithm
- design principles
- neural network
- data mining
- machine learning
- case study
- computer aided
- lessons learned
- key issues
- interactive systems
- design methodology
- design decisions
- knowledge based systems
- user interface
- multi agent systems
- genetic algorithm
- real world