Characterization of a Nanometer Displacement Gauge for the Dimensional Control of Large Optomechanical Structures.
Alberto DonazzanGiampiero NalettoJacopo BelfiDavide CuccatoAlain Jody CorsoAngela Di VirgilioAntonello OrtolanMaria Guglielmina PelizzoPublished in: IEEE Trans. Instrum. Meas. (2019)