Interval-valued statistical modeling of oxide chemical-mechanical polishing.
James D. MaClaire Fang FangRob A. RutenbarXiaolin XieDuane S. BoningPublished in: ICCAD (2005)
Keyphrases
- statistical modeling
- interval valued
- real valued
- fuzzy sets
- statistical models
- partially ordered
- group decision making
- representation scheme
- interval valued fuzzy sets
- intuitionistic fuzzy sets
- score function
- statistical model
- aggregation operators
- fuzzy set theory
- interval valued fuzzy
- higher order
- machine learning
- neural network
- rough sets
- fuzzy logic
- pattern recognition
- multiscale