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A fast three-dimensional process simulator OPUS/3D with access to two-dimensional simulation results.

Shintaro UshioKenji NishiShigeki KurodaKazuhiko KaiJun Ueda
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1990)
Keyphrases
  • three dimensional
  • simulation model
  • multi dimensional
  • simulation environment
  • real time
  • information retrieval
  • information systems
  • expert systems
  • access control
  • test bed
  • simulation platform