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A New Method of Fixing High-Aspect-Ratio Microstructures by Gel.

Nan ChenXiangyu ChenPenghui XiongShuangyue HouXiaobo ZhangYing XiongGang LiuYangchao Tian
Published in: Micromachines (2016)
Keyphrases
  • aspect ratio
  • pairwise
  • closed form
  • region of interest