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Source/drain extension asymmetric counter-doping for suppressing channel leakage in stacked nanosheet transistors.

Qingkun LiLei CaoQingzhu ZhangLianlian LiXuexiang ZhangChuqiao NiuGuanqiao SangYunjiao BaoHuaxiang YinZhenhua Wu
Published in: Microelectron. J. (2024)
Keyphrases
  • noisy channel
  • power consumption
  • multi channel
  • real time
  • high density
  • early warning
  • integrated circuit
  • ofdm system
  • multiple access