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Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS.

Yuji SasakiMauro CiappaTakayuki MasunagaWolfgang Fichtner
Published in: Microelectron. Reliab. (2010)
Keyphrases
  • thin film
  • mechanical properties
  • design process
  • composite materials
  • computer aided
  • short circuit
  • image data