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The Combination of Equipment Scale and Feature Scale Models for Chemical Vapor Deposition Via a Homogenization Technique.
Matthias K. Gobbert
Timothy S. Cale
Christian A. Ringhofer
Published in:
VLSI Design (1998)
Keyphrases
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machine learning
feature extraction
multiscale
probabilistic model
model selection
experimental data
neural network
information retrieval
search engine
low cost
scale space
statistical model
autoregressive
scale invariant
thin film