Strain Effects in van der Pauw (VDP) Stress Sensor Fabricated on (111) Silicon.

Chun-Hyung Cho Ginkyu Choi Ho-Young Cha

Published in: IEICE Trans. Electron. (2010)

Keyphrases

van der
high speed
sensor networks
charge coupled device
image sensor
cmos technology
cmos image sensor
low cost
data acquisition
stress distribution
multi sensor
image acquisition
sensor data
data fusion
finite element analysis
high sensitivity