Direct measurement of residual stress in integrated circuit interconnect features.
Aulton B. HorsfallJoyce M. M. dos SantosS. M. SoareNicholas G. WrightA. G. O'NeillS. J. BullAnthony J. WaltonAlan M. GundlachJ. T. M. StevensonPublished in: Microelectron. Reliab. (2003)