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Direct measurement of residual stress in integrated circuit interconnect features.

Aulton B. HorsfallJoyce M. M. dos SantosS. M. SoareNicholas G. WrightA. G. O'NeillS. J. BullAnthony J. WaltonAlan M. GundlachJ. T. M. Stevenson
Published in: Microelectron. Reliab. (2003)
Keyphrases
  • integrated circuit
  • feature space
  • feature vectors
  • false positives
  • image features
  • high speed
  • electron beam
  • feature selection
  • decision trees
  • feature set