Interpretable, Online Soft-Sensors for Process Control.
Mark EastwoodPetr KadlecPublished in: ICDM Workshops (2011)
Keyphrases
- process control
- control system
- real time
- product quality
- intelligent control
- online learning
- manufacturing process
- semiconductor manufacturing
- sensor networks
- sensor data
- sensor fusion
- information retrieval
- control strategy
- sensor technology
- cross cultural
- physical world
- multi sensor
- classification rules
- data fusion
- data mining
- neural network