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Micromachined high-Q inductors in 0.18 μm Cu interconnect low-K CMOS.
Hasnain Lakdawala
Xu Zhu
Hao Luo
Suresh Santhanam
L. Rick Carley
Gary K. Fedder
Published in:
CICC (2001)
Keyphrases
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high speed
high levels
low cost
wide range
high sensitivity
significantly lower
low power consumption
high rate
image processing
high noise
high correlation
small size
power consumption
real time
low power
high precision
multiresolution
sufficiently high