Some practical considerations for effective and efficient wafer-level reliability control.
Summer F. C. TsengWei-Ting Kary ChienExcimer GongWillings WangBing-Chu CaiPublished in: Microelectron. Reliab. (2004)
Keyphrases
- cost effective
- computationally efficient
- high quality
- control method
- control system
- semiconductor manufacturing
- process control
- massively parallel
- control strategy
- computationally expensive
- databases
- data sets
- evolutionary algorithm
- low cost
- high level
- mathematical model
- case study
- computer vision
- genetic algorithm
- optimal control
- neural network
- highly efficient
- control strategies
- real time