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Insight extraction for semiconductor manufacturing processes.
Simone Pampuri
Gian Antonio Susto
Jian Wan
Adrian B. Johnston
Paul G. O'Hara
Seán F. McLoone
Published in:
CASE (2014)
Keyphrases
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manufacturing processes
manufacturing systems
product quality
information extraction
process control
machining processes
real time
cooperative
semiconductor manufacturing
databases
data model
web applications
mathematical models