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Determination of Wafer Start Mix in Semiconductor Manufacturing During New Technology Ramp-Up: Model, Solution Method, and an Empirical Study.
Kuo-Hao Chang
Liam Y. Hsieh
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2016)
Keyphrases
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mathematical model
objective function
statistical model
semiconductor manufacturing
probabilistic model
optimization method
cost function
theoretical analysis
fuzzy linear programming
prior knowledge
detection method
prior information
closed form
test data
em algorithm
optimization model
iterative procedure
numerical methods
optimization procedure
network model
input data
evaluation method
bp neural network
statistical methods
evaluation model
hybrid model
modeling method
gaussian distribution
approximation methods
linear regression
significant improvement
dynamic programming
energy function
recognition algorithm
evolutionary algorithm
reconstruction method
tree structure
study proposes
regression analysis
autoregressive
linear model
high order
artificial intelligence
markov model
classification algorithm
segmentation method
monte carlo simulation
maximum likelihood
classification method
prediction model
control policy
pairwise
similarity measure