Determination of Wafer Start Mix in Semiconductor Manufacturing During New Technology Ramp-Up: Model, Solution Method, and an Empirical Study.
Kuo-Hao ChangLiam Y. HsiehPublished in: IEEE Trans. Syst. Man Cybern. Syst. (2016)
Keyphrases
- mathematical model
- objective function
- statistical model
- semiconductor manufacturing
- probabilistic model
- optimization method
- cost function
- theoretical analysis
- fuzzy linear programming
- prior knowledge
- detection method
- prior information
- closed form
- test data
- em algorithm
- optimization model
- iterative procedure
- numerical methods
- optimization procedure
- network model
- input data
- evaluation method
- bp neural network
- statistical methods
- evaluation model
- hybrid model
- modeling method
- gaussian distribution
- approximation methods
- linear regression
- significant improvement
- dynamic programming
- energy function
- recognition algorithm
- evolutionary algorithm
- reconstruction method
- tree structure
- study proposes
- regression analysis
- autoregressive
- linear model
- high order
- artificial intelligence
- markov model
- classification algorithm
- segmentation method
- monte carlo simulation
- maximum likelihood
- classification method
- prediction model
- control policy
- pairwise
- similarity measure